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Lithography is one of the most critical elements in the production of silicon semiconductors, chips or integrated circuits (ICs). It is a photographic process that uses precision light sources to copy intricate computer-generated electronic circuit designs onto the semiconductor wafers and subsequently cut into 'chips'. A typical lithography system consists of an illumination source integrated into an apparatus known as a "stepper" or an "aligner". The combined system is installed in the semiconductor fabrication line.
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Semiconductor Lithography Equipment - Background