CW Diode Pumped Solid State Laser

JMAR's Nd: YAG CW Diode Pumped Solid State laser development is the result of many years of research and development. JMAR's design technique allows for the creation of a variety of configurations. Some of the key advantages of JMAR's lasers are:

  • High Brightness
  • High Beam Quality (less than 5x DL)
  • Short Pulse Duration (as low as 1ns)
  • High Repetition Rate (up to 5kHz)
  • Building Block Architecture Provides Multiple Design Options

JMAR's dual head CW DPSS laser

Listed below is a summary of JMAR's laser building blocks that can be combined to form custom lasers for specific applications inclusive of sources for EUV lithography.

1) Single small head oscillator: 120W transversely pumping a 3mm rod
Free running
Power 30W
Beam quality 5 * xDL

2) Two small heads oscillator: Dual 120W transversely pumping 3mm rods
Free running AO/EO Q-switch Cavity dumped Short pulse
Energy/pulse 50W (CW) 3 * mJ/3 * mJ 0.2 - 0.6mJ 0.5mJ
Rep. Rate CW 5000Hz 5000Hz 5000Hz
Pulse duration CW 100 * ns/20 * ns 3-7ns 1ns
Beam quality 5 * xDL 3 * xDL <1.2xDL <1.2xDL

3) Single small head oscillator: 240W transversely pumping a 3mm rod
Free running
Power 60W
Beam quality 7 * xDL

4) Two small heads oscillator: Dual 240W transversely pumping 3mm rods
Free running AO/EO Q-switch Cavity dumped Short pulse
Energy/pulse 100W (CW) 6 * mJ/6 * mJ 0.4 * - 1.2 * mJ 1 * mJ
Rep. Rate CW 5000Hz 5000Hz 5000Hz
Pulse duration CW 100 * ns/20 * ns 3-7ns 1ns
Beam quality 5 * xDL 3 * xDL <1.2xDL <1.2xDL

5) Single head oscillator: 1250W arrays transversely pumping an 8mm rod
Free running
Power 440W
Beam quality 20 * xDL

6) Two heads oscillator: Dual 1250W arrays transversely pumping 8mm rods
Free running Q-switch
Energy/pulse 850W (CW) 85 * mJ
Rep. Rate CW 5000Hz
Pulse duration CW 100 * ns
Beam quality 10 * xDL 5 * xDL

7) Dual heads amplifier: Two 5000W arrays transversely pumping 8mm rods
Extracted Energy/pulse 75mJ (max.)
Rep. Rate 5000Hz
Single pass gain 2
Beam quality <2xDL

The above lasers can also be arranged in various configurations to obtain the desired laser system specifications.


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